Canon’s Breakthrough in Lithography: Revolutionizing the Semiconductor Industry

Canon’s Breakthrough in Lithography: Revolutionizing the Semiconductor Industry

In recent years, the semiconductor industry has witnessed remarkable advancements in chip manufacturing technology. One key player in this field, ASML, has held a virtual monopoly on lithography equipment, which is crucial for producing cutting-edge integrated circuits.

However, a new contender has emerged – Canon. In an unprecedented move, Canon is set to challenge ASML’s dominance with its NanoImprint Lithography (NIL) equipment.

ASML Monopoly and Canon’s Entry

For years, ASML has been the go-to supplier for lithography equipment, leaving its competitors, including Canon and Nikon, far behind. The exorbitant costs associated with developing extreme ultraviolet (EUV) lithography machines deterred Canon and Nikon from entering the race.

Despite this, ASML managed to perfect its EUV lithography technology and establish its dominance. Today, ASML’s equipment is used by major semiconductor manufacturers such as TSMC, Intel, and Samsung.

Introducing Canon’s NanoImprint Lithography (NIL)

Canon’s entry into the lithography market comes in the form of NanoImprint Lithography (NIL). Unlike ASML’s EUV lithography, NIL uses a simpler and more cost-effective approach to transfer patterns onto silicon wafers.

Rather than relying on complex optical systems, NIL directly imprints the pattern onto the wafer. This alternative method offers a range of advantages, including lower costs and the ability to manufacture chips with a smaller feature size.

Canon’s Journey to NIL

Canon embarked on its NIL journey back in 2004. After years of research and development, the company delivered its first functional NIL machine, the FPA-1200NZ2C, to Toshiba in 2017. Since then, Canon has continued to refine its NIL technology, aiming to compete head-on with ASML’s EUV machines.

Canon’s commitment to innovation and cost-effectiveness has paid off, as it now boasts NIL equipment capable of producing integrated circuits equivalent to those created by ASML’s EUV machines.

Advantages of Canon’s NIL Equipment

Canon’s NIL equipment offers several advantages over ASML’s EUV lithography machines. Firstly, the cost of a NIL machine is approximately ten times lower than that of an EUV machine, with a price tag of around $15 million compared to ASML’s $150 million.

This significant cost difference makes Canon’s equipment more accessible to semiconductor manufacturers, leveling the playing field and breaking ASML’s monopolistic hold.

Secondly, Canon’s NIL technology allows for the production of chips with a feature size as small as 2 nm. This capability puts Canon on par with ASML’s EUV machines, allowing semiconductor manufacturers to achieve the same level of performance and miniaturization.

With the continuous refinement of NIL technology, Canon aims to push the boundaries even further and enable the production of 1 nm chips in the future.

Canon’s Impact on the Semiconductor Industry

Canon’s entry into the lithography market has the potential to disrupt the semiconductor industry. By offering a more cost-effective alternative to ASML’s EUV lithography, Canon opens up new opportunities for smaller semiconductor manufacturers to compete in the market. This increased competition may lead to accelerated technological advancements and more affordable chips for consumers.

Moreover, Canon’s NIL technology could have a significant impact on specific sectors within the semiconductor industry. For instance, Canon’s equipment is particularly suitable for producing NAND flash chips.

This advantage has caught the attention of SK Hynix, a major player in the memory chip market, signaling a potential partnership between the two companies.

Road Ahead for Canon

Canon’s journey to challenge ASML’s monopoly is far from over. The company plans to deliver its first NIL lithography machines to select customers by the end of 2024. SK Hynix has already expressed interest in Canon’s technology, highlighting the potential applications in NAND flash chip production.

With ongoing advancements and improvements, Canon aims to carve out a significant market share and establish itself as a formidable competitor to ASML.


Canon’s breakthrough in lithography with its NanoImprint Lithography (NIL) equipment marks an important milestone in the semiconductor industry. By offering a more cost-effective alternative to ASML’s EUV lithography, Canon has the potential to reshape the landscape of chip manufacturing.

With the ability to produce chips with a feature size as small as 2 nm, Canon’s NIL technology opens up new possibilities for technological innovation and market competition. As Canon continues to refine its NIL equipment and deliver it to customers, the semiconductor industry awaits an exciting era of increased accessibility, affordability, and advanced chip manufacturing.